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Microoptical components and optomechanical microde

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专利名称:Microoptical components and

optomechanical microdeflectors withmicrolens displacement

发明人:Marc Rabarot,Engin Molva,Eric Ollier申请号:US08/636961申请日:19960424公开号:US05734490A公开日:19980331

摘要:A microoptical component including a microlens having a focal axis and amicrobeam to which said microlens, is integrally fixed said microbeam extending along anaxis substantially perpendicular to the focal axis of the microlens and undergoing elasticdeformations along an axis substantially perpendicular to the focal axis of the microlensand to the axis along which the microbeam extends.

申请人:COMMISSARIAT A L'ENERGIE ATOMIQUE

代理机构:Oblon, Spivak, McClelland, Maier & Neustadt, P

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